Vaisala K-PATENTS® Semicon Refractometer PR-33-S
A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting.
Vaisala K-PATENTS® Semicon Refractometer PR-33-S monitors the fab chemicals’ concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).
Jens Poulsen
Kontakt mig hvis du har nogle spørgsmål.
Tlf: (+45) 21 14 10 50
Email: jp@liscotech.dk