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Vaisala K-PATENTS® Semicon Refractometer PR-33-S

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Vaisala K-PATENTS® Semicon Refractometer PR-33-S

A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting.

Vaisala K-PATENTS® Semicon Refractometer PR-33-S monitors the fab chemicals’ concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).